| Utility: Electrostatic chuck cleaning fixture Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 12 Dec 2013 | 27 Aug 2019 |
| Utility: Feedback Control System for Iterative Etch Process Filling date: 6 Sep 2025 Issue date: 22 Aug 2019 | 22 Feb 2018 | 22 Aug 2019 |
| Utility: Inter-electrode gap variation methods for compensating deposition non-uniformity Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 2 Jan 2018 | 20 Aug 2019 |
| Utility: Universal multiprotocol industrial data logger Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 27 Sep 2017 | 20 Aug 2019 |
| Utility: Methods and apparatuses for etch profile matching by surface kinetic model optimization Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 17 Dec 2015 | 20 Aug 2019 |
| Utility: Apparatus for UV flowable dielectric Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 16 Nov 2015 | 20 Aug 2019 |
| Utility: Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 21 Sep 2015 | 20 Aug 2019 |
| Utility: Automated Replacement of Consumable Parts Using Interfacing Chambers Filling date: 6 Sep 2025 Issue date: 15 Aug 2019 | 29 Apr 2019 | 15 Aug 2019 |
| Utility: Plasma Processing System having an inspection tool and Controller that Interfaces with a Tool Model Filling date: 6 Sep 2025 Issue date: 15 Aug 2019 | 23 Apr 2019 | 15 Aug 2019 |
| Utility: AMMONIA PRE-TREATMENT TO PROMOTE AMORPHOUS SILICON ADHESION TO ALUMINUM NITRIDE Filling date: 6 Sep 2025 Issue date: 15 Aug 2019 | 4 Feb 2019 | 15 Aug 2019 |
| Utility: PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST EDGE PLACEMENT ERROR PREDICTION VIA A PHYSICS-BASED ETCH PROFILE MODELING FRAMEWORK Filling date: 6 Sep 2025 Issue date: 15 Aug 2019 | 18 Dec 2018 | 15 Aug 2019 |
| Utility: Step ladder with component rack system for fabrication facility Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 12 Jul 2017 | 13 Aug 2019 |
| Utility: Control of etch rate using modeling, feedback and impedance match Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 20 Mar 2017 | 13 Aug 2019 |
| Utility: Auto-correction of electrostatic chuck temperature non-uniformity Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 21 Sep 2015 | 13 Aug 2019 |
| Utility: Low volume showerhead with faceplate holes for improved flow uniformity Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 10 Sep 2015 | 13 Aug 2019 |
| Utility: Method of Feature Exaction from Time-series of Spectra to Control Endpoint of Process Filling date: 6 Sep 2025 Issue date: 8 Aug 2019 | 16 Apr 2019 | 8 Aug 2019 |
| Utility: SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATED WITH AN EDGE REGION WITHIN A PLASMA CHAMBER BY SYNCHRONIZING MAIN AND EDGE RF GENERATORS Filling date: 6 Sep 2025 Issue date: 8 Aug 2019 | 15 Apr 2019 | 8 Aug 2019 |
| Utility: ETCHING SUBSTRATES USING ALE AND SELECTIVE DEPOSITION Filling date: 6 Sep 2025 Issue date: 8 Aug 2019 | 21 Mar 2019 | 8 Aug 2019 |
| Utility: TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING Filling date: 6 Sep 2025 Issue date: 8 Aug 2019 | 5 Feb 2018 | 8 Aug 2019 |
| Utility: Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 17 Jul 2018 | 6 Aug 2019 |
| Utility: Dry plasma etch method to pattern MRAM stack Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 28 Sep 2017 | 6 Aug 2019 |
| Utility: Apparatus and method for deposition and etch in gap fill Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 22 Aug 2017 | 6 Aug 2019 |
| Utility: Technique to deposit sidewall passivation for high aspect ratio cylinder etch Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 17 May 2016 | 6 Aug 2019 |
| Utility: Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 6 Apr 2016 | 6 Aug 2019 |
| Utility: Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 10 Dec 2015 | 6 Aug 2019 |
| Utility: ION BEAM ETCH WITHOUT NEED FOR WAFER TILT OR ROTATION Filling date: 6 Sep 2025 Issue date: 1 Aug 2019 | 15 Apr 2019 | 1 Aug 2019 |
| Utility: TIN OXIDE MANDRELS IN PATTERNING Filling date: 6 Sep 2025 Issue date: 1 Aug 2019 | 29 Jan 2019 | 1 Aug 2019 |
| Utility: ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND THERMAL SINKING Filling date: 6 Sep 2025 Issue date: 1 Aug 2019 | 1 Feb 2018 | 1 Aug 2019 |
| Utility: METHOD TO SELECTIVELY PATTERN A SURFACE FOR PLASMA RESISTANT COAT APPLICATIONS Filling date: 6 Sep 2025 Issue date: 1 Aug 2019 | 30 Jan 2018 | 1 Aug 2019 |
| Utility: SPACER PROFILE CONTROL USING ATOMIC LAYER DEPOSITION IN A MULTIPLE PATTERNING PROCESS Filling date: 6 Sep 2025 Issue date: 1 Aug 2019 | 26 Jan 2018 | 1 Aug 2019 |
| Utility: Active feedback control of subsystems of a process module Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 | 20 Nov 2017 | 30 Jul 2019 |
| Utility: Dynamic modulation of cross flow manifold during elecroplating Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 | 1 Aug 2016 | 30 Jul 2019 |
| Utility: Gas distribution system for ceramic showerhead of plasma etch reactor Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 | 25 Jan 2016 | 30 Jul 2019 |
