Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Application | Utility: MEMS CORIOLIS GAS FLOW CONTROLLER Filling date: 6 Sep 2025 Issue date: 13 May 2021 |
Grant | Utility: Methods and apparatus for flow isolation and focusing during electroplating Filling date: 6 Sep 2025 Issue date: 11 May 2021 |
Grant | Utility: Temperature controlled spacer for use in a substrate processing chamber Filling date: 6 Sep 2025 Issue date: 11 May 2021 |
Application | Utility: CONTROLLING PLATING ELECTROLYTE CONCENTRATION ON AN ELECTROCHEMICAL PLATING APPARATUS Filling date: 6 Sep 2025 Issue date: 6 May 2021 |
Grant | Utility: Method of etch model calibration using optical scatterometry Filling date: 6 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Selective deposition with atomic layer etch reset Filling date: 6 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Ion beam etch without need for wafer tilt or rotation Filling date: 6 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Apparatus for measuring condition of electroplating cell components and associated methods Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Systems and methods for combining optical metrology with mass metrology Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Application | Utility: ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES Filling date: 6 Sep 2025 Issue date: 22 Apr 2021 |
Grant | Utility: Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 |
Grant | Utility: Integrated elastomeric lipseal and cup bottom for reducing wafer sticking Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 |
Grant | Utility: Sensor and adjuster for a consumable Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 |
Application | Utility: Methods for Depositing a Film on a Backside of a Substrate Filling date: 6 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING Filling date: 6 Sep 2025 Issue date: 15 Apr 2021 |
Grant | Utility: Fill process optimization using feature scale modeling Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: Substrate holder having integrated temperature measurement electrical devices Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: One-piece anode for tuning electroplating at an edge of a substrate Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 |
Application | Utility: THERMAL ATOMIC LAYER ETCH WITH RAPID TEMPERATURE CYCLING Filling date: 6 Sep 2025 Issue date: 8 Apr 2021 |
Grant | Utility: Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: Auto-calibrated process independent feedforward control for processing substrates Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: High flow multi-way piston valve for deposition systems Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: Conditioning chamber component Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 |
Application | Utility: MEMS-BASED CORIOLIS MASS FLOW CONTROLLER Filling date: 6 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT Filling date: 6 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS Filling date: 6 Sep 2025 Issue date: 1 Apr 2021 |
Grant | Utility: Apparatus including metallized-ceramic tubes for radio-frequency and gas delivery Filling date: 6 Sep 2025 Issue date: 30 Mar 2021 |
Grant | Utility: Electrode for plasma processing chamber Filling date: 6 Sep 2025 Issue date: 30 Mar 2021 |
Application | Utility: CARRIER PLATE FOR USE IN PLASMA PROCESSING SYSTEMS Filling date: 6 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: RF CURRENT MEASUREMENT IN SEMICONDUCTOR PROCESSING TOOL Filling date: 6 Sep 2025 Issue date: 25 Mar 2021 |
Grant | Utility: Apparatus and method for deposition and etch in gap fill Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Long-life high-power terminals for substrate support with embedded heating elements Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Image based plasma sheath profile detection on plasma processing tools Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Methods and apparatuses for electroplating nickel using sulfur-free nickel anodes Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Gas delivery system Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 |
Application | Utility: DUAL-MODE AUTONOMOUS GUIDED VEHICLE Filling date: 6 Sep 2025 Issue date: 18 Mar 2021 |
Grant | Utility: Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Using modeling for identifying a location of a fault in an RF transmission system for a plasma system Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Electrostatic chuck filter box and mounting bracket Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Rotary friction welded blank for PECVD heated showerhead Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Gas distributor and flow verifier Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Methods and systems for advanced ion control for etching processes Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Tunable upper plasma-exclusion-zone ring for a bevel etcher Filling date: 6 Sep 2025 Issue date: 2 Mar 2021 |
Application | Utility: METHOD TO CLEAN SNO2 FILM FROM CHAMBER Filling date: 6 Sep 2025 Issue date: 25 Feb 2021 |
Grant | Utility: Controlling plating electrolyte concentration on an electrochemical plating apparatus Filling date: 6 Sep 2025 Issue date: 23 Feb 2021 |
Grant | Utility: Apparatus with optical cavity for determining process rate Filling date: 6 Sep 2025 Issue date: 23 Feb 2021 |
Grant | Utility: Copper electrodeposition sequence for the filling of cobalt lined features Filling date: 6 Sep 2025 Issue date: 23 Feb 2021 |
Application | Utility: CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS Filling date: 6 Sep 2025 Issue date: 18 Feb 2021 |
Showing 200 to 250 of 883 patents.