Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Application | Utility: AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER Filling date: 6 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: REMOVING BUBBLES FROM PLATING CELL Filling date: 6 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL Filling date: 6 Sep 2025 Issue date: 27 Aug 2020 |
Grant | Utility: Multi-level pulsing of DC and RF signals Filling date: 6 Sep 2025 Issue date: 25 Aug 2020 |
Grant | Utility: Ion energy control by RF pulse shape Filling date: 6 Sep 2025 Issue date: 25 Aug 2020 |
Grant | Utility: Showerhead with air-gapped plenums and overhead isolation gas distributor Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: Dry plasma etch method to pattern MRAM stack Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: RF impedance model based fault detection Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: System and method for automating user interaction for semiconductor manufacturing equipment Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: Edge exclusion control with adjustable plasma exclusion zone ring Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Application | Utility: USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMIC PEDESTALS Filling date: 6 Sep 2025 Issue date: 13 Aug 2020 |
Application | Utility: COPPER ELECTRODEPOSITION ON COBALT LINED FEATURES Filling date: 6 Sep 2025 Issue date: 13 Aug 2020 |
Grant | Utility: Reduction of sidewall notching for high aspect ratio 3D NAND etch Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Model-based control of substrate processing systems Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Metal liner passivation and adhesion enhancement by zinc doping Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Manufacture of an orifice plate for use in gas calibration Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Helium plug design to reduce arcing Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Methods for processing substrates using a movable plasma confinement structure Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Low volume showerhead with porous baffle Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Application | Utility: APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL Filling date: 6 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION Filling date: 6 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS Filling date: 6 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBSTRATE Filling date: 6 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: MUTUALLY INDUCED FILTERS Filling date: 6 Sep 2025 Issue date: 6 Aug 2020 |
Grant | Utility: Depositing ruthenium layers in interconnect metallization Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Atomic layer deposition and etch in a single plasma chamber for critical dimension control Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Application | Utility: Multiple-Output Radiofrequency Matching Module and Associated Methods Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: ADJUSTMENT OF POWER AND FREQUENCY BASED ON THREE OR MORE STATES Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: ATOMIC LAYER DEPOSITION AND ETCH FOR REDUCING ROUGHNESS Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: FILL PROCESS OPTIMIZATION USING FEATURE SCALE MODELING Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: ELECTROMAGNETIC CASTING SYSTEMS INCLUDING FURNACES AND MOLDS FOR PRODUCING SILICON TUBES Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Grant | Utility: Method for controlling core critical dimension variation using flash trim sequence Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Surface modified depth controlled deposition for plasma based deposition Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: System and method for calculating substrate support temperature Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Systems and methods for selectively etching film Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Application | Utility: Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation Plating Filling date: 6 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM Filling date: 6 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: METHOD OF CONTROLLING A PATTERNING PROCESS, LITHOGRAPHIC APPARATUS, METROLOGY APPARATUS LITHOGRAPHIC CELL AND ASSOCIATED COMPUTER PROGRAM Filling date: 6 Sep 2025 Issue date: 23 Jul 2020 |
Grant | Utility: Confinement ring for use in a plasma processing system Filling date: 6 Sep 2025 Issue date: 21 Jul 2020 |
Grant | Utility: Substrate support with thermal zones for semiconductor processing Filling date: 6 Sep 2025 Issue date: 21 Jul 2020 |
Application | Utility: PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT Filling date: 6 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS Filling date: 6 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION Filling date: 6 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring Filling date: 6 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT Filling date: 6 Sep 2025 Issue date: 16 Jul 2020 |
Grant | Utility: Plasma assisted doping on germanium Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 |
Showing 400 to 450 of 883 patents.