Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Application | Utility: ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: MODULAR-COMPONENT SYSTEM FOR GAS DELIVERY Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: ELECTROSTATIC CHUCK WITH SPATIALLY TUNABLE RF COUPLING TO A WAFER Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: CARBON BASED DEPOSITIONS USED FOR CRITICAL DIMENSION CONTROL DURING HIGH ASPECT RATIO FEATURE ETCHES AND FOR FORMING PROTECTIVE LAYERS Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Grant | Utility: Ex situ coating of chamber components for semiconductor processing Filling date: 6 Sep 2025 Issue date: 21 Jun 2022 |
Application | Utility: SURFACE COATING TREATMENT Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 |
Grant | Utility: Adjustment of power and frequency based on three or more states Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 |
Grant | Utility: Thermal imaging for within wafer variability feedforward or feedback information Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Method for preventing line bending during metal fill process Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Tin oxide mandrels in patterning Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 |
Application | Utility: EARLY WARNING SYSTEMS AND METHODS FOR DETERMINING CAPACITOR FAILURES Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAMBERS Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: ELECTROSTATIC CHUCK HEATER RESISTANCE MEASUREMENT TO APPROXIMATE TEMPERATURE Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: PRECURSORS FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: TUNGSTEN FEATURE FILL WITH INHIBITION CONTROL Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Grant | Utility: Metal fill process for three-dimensional vertical NAND wordline Filling date: 6 Sep 2025 Issue date: 31 May 2022 |
Application | Utility: TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: SYSTEMS AND METHODS FOR TUNING A MHZ RF GENERATOR WITHIN A CYCLE OF OPERATION OF A KHZ RF GENERATOR Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PROCESS COOLING-WATER ISOLATION Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: METHOD FOR PROVIDING DOPED SILICON Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION (ALD) SUBSTRATE PROCESSING CHAMBERS Filling date: 6 Sep 2025 Issue date: 26 May 2022 |
Grant | Utility: Confinement ring for use in a plasma processing system Filling date: 6 Sep 2025 Issue date: 24 May 2022 |
Grant | Utility: Variable depth edge ring for etch uniformity control Filling date: 6 Sep 2025 Issue date: 24 May 2022 |
Grant | Utility: RF pulsing within pulsing for semiconductor RF plasma processing Filling date: 6 Sep 2025 Issue date: 24 May 2022 |
Application | Utility: COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS MULTIPLE PLASMA PROCESSING STATIONS Filling date: 6 Sep 2025 Issue date: 19 May 2022 |
Grant | Utility: Systems and methods for optimizing power delivery to an electrode of a plasma chamber Filling date: 6 Sep 2025 Issue date: 17 May 2022 |
Grant | Utility: Systems and methods for reducing effluent build-up in a pumping exhaust system Filling date: 6 Sep 2025 Issue date: 17 May 2022 |
Application | Utility: MUTUALLY INDUCED FILTERS Filling date: 6 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTERIUM PLASMA Filling date: 6 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS Filling date: 6 Sep 2025 Issue date: 5 May 2022 |
Grant | Utility: Controller for controlling core critical dimension variation using flash trim sequence Filling date: 6 Sep 2025 Issue date: 3 May 2022 |
Grant | Utility: Tin oxide films in semiconductor device manufacturing Filling date: 6 Sep 2025 Issue date: 3 May 2022 |
Application | Utility: ELECTROSTATIC CHUCK WITH POWDER COATING Filling date: 6 Sep 2025 Issue date: 28 Apr 2022 |
Grant | Utility: Underlayer for photoresist adhesion and dose reduction Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Application | Utility: ELIMINATING YIELD IMPACT OF STOCHASTICS IN LITHOGRAPHY Filling date: 6 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT Filling date: 6 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: SELECTIVE ETCH USING A SACRIFICIAL MASK Filling date: 6 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION Filling date: 6 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS Filling date: 6 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: LAMINATED AEROSOL DEPOSITION COATING FOR ALUMINUM COMPONENTS FOR PLASMA PROCESSING CHAMBERS Filling date: 6 Sep 2025 Issue date: 14 Apr 2022 |
Grant | Design: High density hole pattern dual plenum hole showerhead assembly Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Apparatus for spatial and temporal control of temperature on a substrate Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Application | Utility: CARRIER RING DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE Filling date: 6 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: SHOWERHEAD SHROUD Filling date: 6 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: DIFFERENTIAL-PRESSURE-BASED FLOW METERS Filling date: 6 Sep 2025 Issue date: 7 Apr 2022 |
Grant | Utility: Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching Filling date: 6 Sep 2025 Issue date: 5 Apr 2022 |
Showing 50 to 100 of 883 patents.