| Utility: Manganese barrier and adhesion layers for cobalt Filling date: 6 Sep 2025 Issue date: 8 Oct 2019 | 10 May 2017 | 8 Oct 2019 |
| Utility: Apparatus for measuring condition of electroplating cell components and associated methods Filling date: 6 Sep 2025 Issue date: 8 Oct 2019 | 18 Apr 2017 | 8 Oct 2019 |
| Utility: Wafer lift ring system for wafer transfer Filling date: 6 Sep 2025 Issue date: 8 Oct 2019 | 8 Feb 2017 | 8 Oct 2019 |
| Utility: Methods for automatically determining capacitor values and systems thereof Filling date: 6 Sep 2025 Issue date: 8 Oct 2019 | 29 Aug 2014 | 8 Oct 2019 |
| Utility: DYNAMIC MODULATION OF CROSS FLOW MANIFOLD DURING ELECROPLATING Filling date: 6 Sep 2025 Issue date: 3 Oct 2019 | 5 Jun 2019 | 3 Oct 2019 |
| Utility: COPPER ELECTRODEPOSITION SEQUENCE FOR THE FILLING OF COBALT LINED FEATURES Filling date: 6 Sep 2025 Issue date: 3 Oct 2019 | 30 Mar 2018 | 3 Oct 2019 |
| Utility: COPPER ELECTRODEPOSITION ON COBALT LINED FEATURES Filling date: 6 Sep 2025 Issue date: 3 Oct 2019 | 30 Mar 2018 | 3 Oct 2019 |
| Utility: CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS Filling date: 6 Sep 2025 Issue date: 3 Oct 2019 | 27 Mar 2018 | 3 Oct 2019 |
| Utility: Module including metallized ceramic tubes for RF and gas delivery Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 20 Nov 2018 | 1 Oct 2019 |
| Utility: Powered grid for plasma chamber Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 6 Apr 2018 | 1 Oct 2019 |
| Utility: RF metrology system for a substrate processing apparatus incorporating RF sensors with corresponding lock-in amplifiers Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 15 Mar 2018 | 1 Oct 2019 |
| Utility: Plasma assisted doping on germanium Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 6 Feb 2018 | 1 Oct 2019 |
| Utility: Methods and apparatuses for increasing reactor processing batch size Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 31 Oct 2017 | 1 Oct 2019 |
| Utility: Automated replacement of consumable parts using end effectors interfacing with plasma processing system Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 2 Aug 2017 | 1 Oct 2019 |
| Utility: Mask shrink layer for high aspect ratio dielectric etch Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 22 Nov 2016 | 1 Oct 2019 |
| Utility: Gas plenum arrangement for improving etch non-uniformity in transformer-coupled plasma systems Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 12 Oct 2016 | 1 Oct 2019 |
| Utility: Gas supply delivery arrangement including a gas splitter for tunable gas flow control Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 | 19 Oct 2015 | 1 Oct 2019 |
| Utility: MULTI-LEVEL PULSING OF DC AND RF SIGNALS Filling date: 6 Sep 2025 Issue date: 26 Sep 2019 | 1 May 2019 | 26 Sep 2019 |
| Utility: MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD Filling date: 6 Sep 2025 Issue date: 26 Sep 2019 | 13 Feb 2019 | 26 Sep 2019 |
| Utility: PROTECTIVE COATING FOR ELECTROSTATIC CHUCKS Filling date: 6 Sep 2025 Issue date: 26 Sep 2019 | 20 Mar 2018 | 26 Sep 2019 |
| Utility: Controlling ion energy within a plasma chamber Filling date: 6 Sep 2025 Issue date: 24 Sep 2019 | 13 Nov 2018 | 24 Sep 2019 |
| Utility: Systems, methods and apparatus for choked flow element extraction Filling date: 6 Sep 2025 Issue date: 24 Sep 2019 | 22 Aug 2016 | 24 Sep 2019 |
| Utility: Surface coating treatment Filling date: 6 Sep 2025 Issue date: 24 Sep 2019 | 7 Dec 2015 | 24 Sep 2019 |
| Utility: RF METROLOGY SYSTEM FOR A SUBSTRATE PROCESSING APPARATUS INCORPORATING RF SENSORS WITH CORRESPONDING LOCK-IN AMPLIFIERS Filling date: 6 Sep 2025 Issue date: 19 Sep 2019 | 15 Mar 2018 | 19 Sep 2019 |
| Utility: TURBOMOLECULAR PUMP DEPOSITION CONTROL AND PARTICLE MANAGEMENT Filling date: 6 Sep 2025 Issue date: 19 Sep 2019 | 15 Mar 2018 | 19 Sep 2019 |
| Utility: Frequency Tuning for a Matchless Plasma Source Filling date: 6 Sep 2025 Issue date: 19 Sep 2019 | 14 Mar 2018 | 19 Sep 2019 |
| Utility: Composite dielectric interface layers for interconnect structures Filling date: 6 Sep 2025 Issue date: 17 Sep 2019 | 17 Jul 2018 | 17 Sep 2019 |
| Utility: Remote detection of plating on wafer holding apparatus Filling date: 6 Sep 2025 Issue date: 17 Sep 2019 | 29 Jun 2017 | 17 Sep 2019 |
| Utility: Storing and organizing minimum contact area features and wafer transfer pins during system maintenance Filling date: 6 Sep 2025 Issue date: 17 Sep 2019 | 20 Jul 2016 | 17 Sep 2019 |
| Utility: Mass Flow Controller for Substrate Processing Filling date: 6 Sep 2025 Issue date: 12 Sep 2019 | 9 Mar 2018 | 12 Sep 2019 |
| Utility: Methods and apparatuses for electroplating and seed layer detection Filling date: 6 Sep 2025 Issue date: 10 Sep 2019 | 20 Dec 2018 | 10 Sep 2019 |
| Utility: Systems and methods for tuning to reduce reflected power in multiple states Filling date: 6 Sep 2025 Issue date: 10 Sep 2019 | 23 Jan 2018 | 10 Sep 2019 |
| Utility: Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system Filling date: 6 Sep 2025 Issue date: 10 Sep 2019 | 28 Feb 2017 | 10 Sep 2019 |
| Utility: Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment Filling date: 6 Sep 2025 Issue date: 10 Sep 2019 | 19 Aug 2016 | 10 Sep 2019 |
| Utility: PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS Filling date: 6 Sep 2025 Issue date: 5 Sep 2019 | 13 May 2019 | 5 Sep 2019 |
| Utility: SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTEM BY SUPPRESSING PRECURSOR FLOW AND PLASMA OUTSIDE OF SUBSTRATE REGION Filling date: 6 Sep 2025 Issue date: 5 Sep 2019 | 13 May 2019 | 5 Sep 2019 |
| Utility: SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A STEP-WISE FASHION Filling date: 6 Sep 2025 Issue date: 5 Sep 2019 | 9 May 2019 | 5 Sep 2019 |
| Utility: QUARTZ COMPONENT WITH PROTECTIVE COATING Filling date: 6 Sep 2025 Issue date: 5 Sep 2019 | 2 Mar 2018 | 5 Sep 2019 |
| Utility: Ultra-low defect part process Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 12 Oct 2017 | 3 Sep 2019 |
| Utility: Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 27 Jun 2017 | 3 Sep 2019 |
| Utility: Active showerhead Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 9 Nov 2016 | 3 Sep 2019 |
| Utility: Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 11 Jul 2016 | 3 Sep 2019 |
| Utility: Tunable multi-zone gas injection system Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 4 May 2015 | 3 Sep 2019 |
| Utility: Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation Plating Filling date: 6 Sep 2025 Issue date: 29 Aug 2019 | 24 Jul 2018 | 29 Aug 2019 |
| Utility: METHOD MONITORING CHAMBER DRIFT Filling date: 6 Sep 2025 Issue date: 29 Aug 2019 | 27 Feb 2018 | 29 Aug 2019 |
| Utility: MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES Filling date: 6 Sep 2025 Issue date: 29 Aug 2019 | 23 Feb 2018 | 29 Aug 2019 |
| Utility: Chamber with vertical support stem for symmetric conductance and RF delivery Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 18 Jul 2018 | 27 Aug 2019 |
| Utility: Pulsing RF power in etch process to enhance tungsten gapfill performance Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 1 May 2018 | 27 Aug 2019 |
| Utility: Systems and methods for achieving peak ion energy enhancement with a low angular spread Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 31 Aug 2017 | 27 Aug 2019 |
| Utility: Plasma ignition and sustaining apparatus Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 3 Nov 2015 | 27 Aug 2019 |
