Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Application | Utility: AZIMUTHAL CRITICAL DIMENSION NON-UNIFORMITY FOR DOUBLE PATTERNING PROCESS Filling date: 6 Sep 2025 Issue date: 2 Jan 2020 |
Application | Utility: SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS Filling date: 6 Sep 2025 Issue date: 2 Jan 2020 |
Grant | Utility: Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing Filling date: 6 Sep 2025 Issue date: 31 Dec 2019 |
Grant | Utility: System and method for substrate support feed-forward temperature control based on RF power Filling date: 6 Sep 2025 Issue date: 31 Dec 2019 |
Application | Utility: MONITORING SURFACE OXIDE ON SEED LAYERS DURING ELECTROPLATING Filling date: 6 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGANIC MATERIALS Filling date: 6 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: METHOD OF ACHIEVING HIGH SELECTIVITY FOR HIGH ASPECT RATIO DIELECTRIC ETCH Filling date: 6 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: SELECTIVE ATOMIC LAYER ETCHING Filling date: 6 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: PROTECTIVE COATING ON PHOTORESIST FOR PHOTORESIST METROLOGY Filling date: 6 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: MODEL-BASED CONTROL OF SUBSTRATE PROCESSING SYSTEMS Filling date: 6 Sep 2025 Issue date: 26 Dec 2019 |
Grant | Utility: Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Method of achieving high selectivity for high aspect ratio dielectric etch Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Direct drive RF circuit for substrate processing systems Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Atomic layer deposition and etch in a single plasma chamber for fin field effect transistor formation Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Vacuum-integrated hardmask processes and apparatus Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Multi-station tool with wafer transfer microclimate systems Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Flow through line charge volume Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Application | Utility: METHOD TO RECESS COBALT FOR GATE METAL APPLICATION Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: METHOD TO RECESS COBALT FOR GATE METAL APPLICATION Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: SUBSTRATE PROCESSING CHAMBER INCLUDING CONICAL SURFACE FOR REDUCING RECIRCULATION Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TRANSISTORS Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: TEMPERATURE CONTROL SYSTEMS AND METHODS FOR REMOVING METAL OXIDE FILMS Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: ACTIVE CONTROL OF RADIAL ETCH UNIFORMITY Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: DIRECT DRIVE RF CIRCUIT FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 6 Sep 2025 Issue date: 19 Dec 2019 |
Grant | Utility: Low resistivity films containing molybdenum Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Layer-by-layer deposition using hydrogen Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Dynamic coolant mixing manifold Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: TSV bath evaluation using field versus feature contrast Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Smart vibration wafer with optional integration with semiconductor processing tool Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Virtual metrology method for ESC temperature estimation using thermal control elements Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Systems and methods for controlling plasma instability in semiconductor fabrication Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Application | Utility: ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL Filling date: 6 Sep 2025 Issue date: 12 Dec 2019 |
Application | Utility: CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION Filling date: 6 Sep 2025 Issue date: 12 Dec 2019 |
Application | Utility: SUBSTRATE PROCESSING CHAMBER WITH SHOWERHEAD HAVING COOLED FACEPLATE Filling date: 6 Sep 2025 Issue date: 12 Dec 2019 |
Application | Utility: METHOD FOR TRANSFERRING A PATTERN FROM AN ORGANIC MASK Filling date: 6 Sep 2025 Issue date: 12 Dec 2019 |
Grant | Utility: Three or more states for achieving high aspect ratio dielectric etch Filling date: 6 Sep 2025 Issue date: 10 Dec 2019 |
Grant | Utility: Electrochemical doping of thin metal layers employing underpotential deposition and thermal treatment Filling date: 6 Sep 2025 Issue date: 10 Dec 2019 |
Grant | Utility: Plasma etching systems and methods using empirical mode decomposition Filling date: 6 Sep 2025 Issue date: 10 Dec 2019 |
Application | Utility: ACTIVE SHOWERHEAD Filling date: 6 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: SYSTEMS AND METHODS FOR TUNING TO REDUCE REFLECTED POWER IN MULTIPLE STATES Filling date: 6 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF DELIVERY Filling date: 6 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: SYSTEMS AND METHODS FOR CORRECTING NON-UNIFORMITIES IN PLASMA PROCESSING OF SUBSTRATES Filling date: 6 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: METAL LINER PASSIVATION AND ADHESION ENHANCEMENT BY ZINC DOPING Filling date: 6 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: HIGH FLOW MULTI-WAY PISTON VALVE FOR DEPOSITION SYSTEMS Filling date: 6 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: IMAGE BASED PLASMA SHEATH PROFILE DETECTION ON PLASMA PROCESSING TOOLS Filling date: 6 Sep 2025 Issue date: 5 Dec 2019 |
Grant | Utility: Anti-transient showerhead Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Atomic layer clean for removal of photoresist patterning scum Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Component of a plasma processing apparatus having a protective in situ formed layer on a plasma exposed surface Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Showing 700 to 750 of 883 patents.