| Utility: CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS INJECTION ADJUSTMENT Filling date: 6 Sep 2025 Issue date: 28 Nov 2019 | 13 Aug 2019 | 28 Nov 2019 |
| Utility: SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH A LOW ANGULAR SPREAD Filling date: 6 Sep 2025 Issue date: 28 Nov 2019 | 6 Aug 2019 | 28 Nov 2019 |
| Utility: APPARATUS WITH OPTICAL CAVITY FOR DETERMINING PROCESS RATE Filling date: 6 Sep 2025 Issue date: 28 Nov 2019 | 24 May 2018 | 28 Nov 2019 |
| Utility: VIA PREFILL IN A FULLY ALIGNED VIA Filling date: 6 Sep 2025 Issue date: 28 Nov 2019 | 22 May 2018 | 28 Nov 2019 |
| Utility: Selective growth of silicon nitride Filling date: 6 Sep 2025 Issue date: 26 Nov 2019 | 23 Jan 2018 | 26 Nov 2019 |
| Utility: METHODS AND APPARATUSES FOR ELECTROPLATING AND SEED LAYER DETECTION Filling date: 6 Sep 2025 Issue date: 21 Nov 2019 | 30 Jul 2019 | 21 Nov 2019 |
| Utility: ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET Filling date: 6 Sep 2025 Issue date: 21 Nov 2019 | 17 May 2018 | 21 Nov 2019 |
| Utility: SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTRIBUTOR Filling date: 6 Sep 2025 Issue date: 21 Nov 2019 | 17 May 2018 | 21 Nov 2019 |
| Utility: Self-forming barrier process Filling date: 6 Sep 2025 Issue date: 19 Nov 2019 | 11 Dec 2018 | 19 Nov 2019 |
| Utility: Vacuum robot positioning system with reduced sensitivity to chamber pressure Filling date: 6 Sep 2025 Issue date: 19 Nov 2019 | 14 Sep 2018 | 19 Nov 2019 |
| Utility: Use of ion beam etching to generate gate-all-around structure Filling date: 6 Sep 2025 Issue date: 19 Nov 2019 | 15 Nov 2016 | 19 Nov 2019 |
| Utility: Baffle plate and showerhead assemblies and corresponding manufacturing method Filling date: 6 Sep 2025 Issue date: 19 Nov 2019 | 13 Apr 2016 | 19 Nov 2019 |
| Utility: CLUSTER TOOL SYSTEM WITH STEP LADDER ASSEMBLY Filling date: 6 Sep 2025 Issue date: 14 Nov 2019 | 26 Jul 2019 | 14 Nov 2019 |
| Utility: Systems And Methods For Filtering Radio Frequencies From A Signal Of A Thermocouple And Controlling A Temperature Of An Electrode In A Plasma Chamber Filling date: 6 Sep 2025 Issue date: 14 Nov 2019 | 24 Jul 2019 | 14 Nov 2019 |
| Utility: Common Terminal Heater for Ceramic Pedestals Used in Semiconductor for Fabrication Filling date: 6 Sep 2025 Issue date: 14 Nov 2019 | 9 Jul 2019 | 14 Nov 2019 |
| Utility: METHOD OF PROVIDING A PLASMA ATOMIC LAYER DEPOSITION Filling date: 6 Sep 2025 Issue date: 14 Nov 2019 | 8 May 2018 | 14 Nov 2019 |
| Utility: Showerhead with air-gapped plenums and overhead isolation gas distributor Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 | 17 May 2018 | 12 Nov 2019 |
| Utility: Segmenting a model within a plasma system Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 | 28 Sep 2017 | 12 Nov 2019 |
| Utility: Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 | 20 Jun 2017 | 12 Nov 2019 |
| Utility: Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 | 25 Mar 2016 | 12 Nov 2019 |
| Utility: WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 15 Jul 2019 | 7 Nov 2019 |
| Utility: CHUCK FOR EDGE BEVEL REMOVAL AND METHOD FOR CENTERING A WAFER PRIOR TO EDGE BEVEL REMOVAL Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 11 Jul 2019 | 7 Nov 2019 |
| Utility: WAFER CHUCK ASSEMBLY Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 10 Dec 2018 | 7 Nov 2019 |
| Utility: EDGE RING FOCUSED DEPOSITION DURING A CLEANING PROCESS OF A PROCESSING CHAMBER Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 7 May 2018 | 7 Nov 2019 |
| Utility: SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 7 May 2018 | 7 Nov 2019 |
| Utility: USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMIC PEDESTALS Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 7 May 2018 | 7 Nov 2019 |
| Utility: PREDICTING ETCH CHARACTERISTICS IN THERMAL ETCHING AND ATOMIC LAYER ETCHING Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 3 May 2018 | 7 Nov 2019 |
| Utility: REMOVING BUBBLES FROM PLATING CELLS Filling date: 6 Sep 2025 Issue date: 7 Nov 2019 | 1 May 2018 | 7 Nov 2019 |
| Utility: Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator Filling date: 6 Sep 2025 Issue date: 5 Nov 2019 | 14 Apr 2016 | 5 Nov 2019 |
| Utility: APPARATUS FOR UV FLOWABLE DIELECTRIC Filling date: 6 Sep 2025 Issue date: 31 Oct 2019 | 11 Jul 2019 | 31 Oct 2019 |
| Utility: SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUES FOR A LIMITED NUMBER OF SENSORS INCLUDING A TEMPERATURE VALUE OF AN ELECTROSTATIC CHUCK AND ESTIMATING TEMPERATURE DISTRIBUTION PROFILES BASED ON CALIBRATED VALUES Filling date: 6 Sep 2025 Issue date: 31 Oct 2019 | 9 Jul 2019 | 31 Oct 2019 |
| Utility: Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity Filling date: 6 Sep 2025 Issue date: 29 Oct 2019 | 20 Apr 2018 | 29 Oct 2019 |
| Utility: Ferrite cage RF isolator for power circuitry Filling date: 6 Sep 2025 Issue date: 29 Oct 2019 | 30 Nov 2017 | 29 Oct 2019 |
| Utility: Selective growth of SiO2 on dielectric surfaces in the presence of copper Filling date: 6 Sep 2025 Issue date: 29 Oct 2019 | 22 Nov 2017 | 29 Oct 2019 |
| Utility: Boltless substrate support assembly Filling date: 6 Sep 2025 Issue date: 29 Oct 2019 | 8 Mar 2017 | 29 Oct 2019 |
| Utility: Lift pin holder with spring retention for substrate processing systems Filling date: 6 Sep 2025 Issue date: 29 Oct 2019 | 29 Sep 2016 | 29 Oct 2019 |
| Utility: SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH REDUCED DEAD LEGS Filling date: 6 Sep 2025 Issue date: 24 Oct 2019 | 18 Apr 2018 | 24 Oct 2019 |
| Utility: Methods and systems for determining a fault in a gas heater channel Filling date: 6 Sep 2025 Issue date: 22 Oct 2019 | 27 Apr 2018 | 22 Oct 2019 |
| Utility: Method for reducing the wet etch rate of a sin film without damaging the underlying substrate Filling date: 6 Sep 2025 Issue date: 22 Oct 2019 | 11 Nov 2016 | 22 Oct 2019 |
| Utility: CONTROL OF ETCH RATE USING MODELING, FEEDBACK AND IMPEDANCE MATCH Filling date: 6 Sep 2025 Issue date: 17 Oct 2019 | 26 Jun 2019 | 17 Oct 2019 |
| Utility: Spacer profile control using atomic layer deposition in a multiple patterning process Filling date: 6 Sep 2025 Issue date: 15 Oct 2019 | 26 Jan 2018 | 15 Oct 2019 |
| Utility: Monitoring surface oxide on seed layers during electroplating Filling date: 6 Sep 2025 Issue date: 15 Oct 2019 | 30 Mar 2017 | 15 Oct 2019 |
| Utility: Method of tungsten etching Filling date: 6 Sep 2025 Issue date: 15 Oct 2019 | 10 Mar 2017 | 15 Oct 2019 |
| Utility: PERMANENT SECONDARY EROSION CONTAINMENT FOR ELECTROSTATIC CHUCK BONDS Filling date: 6 Sep 2025 Issue date: 10 Oct 2019 | 25 Jun 2019 | 10 Oct 2019 |
| Utility: DRY PLASMA ETCH METHOD TO PATTERN MRAM STACK Filling date: 6 Sep 2025 Issue date: 10 Oct 2019 | 21 Jun 2019 | 10 Oct 2019 |
| Utility: GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AND PECVD METHOD Filling date: 6 Sep 2025 Issue date: 10 Oct 2019 | 31 May 2019 | 10 Oct 2019 |
| Utility: MANUFACTURE OF AN ORIFICE PLATE FOR USE IN GAS CALIBRATION Filling date: 6 Sep 2025 Issue date: 10 Oct 2019 | 9 Apr 2018 | 10 Oct 2019 |
| Utility: METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY Filling date: 6 Sep 2025 Issue date: 10 Oct 2019 | 6 Apr 2018 | 10 Oct 2019 |
| Utility: Low roughness EUV lithography Filling date: 6 Sep 2025 Issue date: 8 Oct 2019 | 1 Mar 2018 | 8 Oct 2019 |
| Utility: Method of determining thermal stability of a substrate support assembly Filling date: 6 Sep 2025 Issue date: 8 Oct 2019 | 24 Jul 2017 | 8 Oct 2019 |
