Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Grant | Utility: Control of directionality in atomic layer etching Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Platform architecture to improve system productivity Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Selective deposition with atomic layer etch reset Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Monolithic gas distribution manifold and various construction techniques and use cases therefor Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Application | Utility: DETERMINING TILT ANGLE IN PATTERNED ARRAYS OF HIGH ASPECT RATIO STRUCTURES Filling date: 6 Sep 2025 Issue date: 6 Feb 2020 |
Application | Utility: PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITION PROCESS Filling date: 6 Sep 2025 Issue date: 6 Feb 2020 |
Application | Utility: METHOD TO INCREASE DEPOSITION RATE OF ALD PROCESS Filling date: 6 Sep 2025 Issue date: 6 Feb 2020 |
Application | Utility: COMPENSATING CHAMBER AND PROCESS EFFECTS TO IMPROVE CRITICAL DIMENSION VARIATION FOR TRIM PROCESS Filling date: 6 Sep 2025 Issue date: 6 Feb 2020 |
Application | Utility: RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR SETTING AND ADJUSTING PARAMETERS OF ELECTRODES IN ELECTROSTATIC CHUCKS Filling date: 6 Sep 2025 Issue date: 6 Feb 2020 |
Grant | Utility: Control of water bow in multiple stations Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Grant | Utility: Pulsed plasma chamber in dual chamber configuration Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Grant | Utility: Plasma excitation for spatial atomic layer deposition (ALD) reactors Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Application | Utility: Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods Filling date: 6 Sep 2025 Issue date: 30 Jan 2020 |
Application | Utility: SYSTEM AND METHOD FOR CHEMICAL AND HEATED WETTING OF SUBSTRATES PRIOR TO METAL PLATING Filling date: 6 Sep 2025 Issue date: 30 Jan 2020 |
Application | Utility: MAINTENANCE MODE POWER SUPPLY SYSTEM Filling date: 6 Sep 2025 Issue date: 30 Jan 2020 |
Application | Utility: MAGNETIC SHIELDING FOR PLASMA SOURCES Filling date: 6 Sep 2025 Issue date: 30 Jan 2020 |
Application | Utility: Method for Controlling Core Critical Dimension Variation Using Flash Trim Sequence Filling date: 6 Sep 2025 Issue date: 30 Jan 2020 |
Grant | Utility: Forming low resistivity fluorine free tungsten film without nucleation Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Tin oxide films in semiconductor device manufacturing Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Method for generating vertical profiles in organic layer etches Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Method to recess cobalt for gate metal application Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Application | Utility: APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL Filling date: 6 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: Minimization of Carbon Loss in ALD SiO2 Deposition on Hardmask Films Filling date: 6 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: RF GENERATOR FOR GENERATING A MODULATED FREQUENCY OR AN INTER-MODULATED FREQUENCY Filling date: 6 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: Dual Gas Feed Showerhead for Deposition Filling date: 6 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: REMOTE PLASMA BASED DEPOSITION OF BORON NITRIDE, BORON CARBIDE, AND BORON CARBONITRIDE FILMS Filling date: 6 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER Filling date: 6 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: GAS DISTRIBUTOR AND FLOW VERIFIER Filling date: 6 Sep 2025 Issue date: 23 Jan 2020 |
Grant | Utility: Method for selectively etching with reduced aspect ratio dependence Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Grant | Utility: Self-assembled monolayers as an etchant in atomic layer etching Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Grant | Utility: Edge ring centering method using ring dynamic alignment data Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Grant | Utility: Systems and methods for tilting a wafer for achieving deposition uniformity Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Application | Utility: PLASMA ASSISTED DOPING ON GERMANIUM Filling date: 6 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: MONOENERGETIC ION GENERATION FOR CONTROLLED ETCH Filling date: 6 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: METHOD AND APPARATUS FOR SYNCHRONIZED PRESSURE REGULATION OF SEPARATED ANODE CHAMBER Filling date: 6 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR PLASMA AND ETCHING Filling date: 6 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: MOVEABLE EDGE RING DESIGNS Filling date: 6 Sep 2025 Issue date: 16 Jan 2020 |
Grant | Utility: Dual push between a host computer system and an RF generator Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Layout pattern proximity correction through edge placement error prediction Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Plasma light up suppression Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Method of sealing open pores on surface of porous dielectric material using iCVD process Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Actuator to dynamically adjust showerhead tilt in a semiconductor processing apparatus Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Application | Utility: SELECTIVE GROWTH OF SIO2 ON DIELECTRIC SURFACES IN THE PRESENCE OF COPPER Filling date: 6 Sep 2025 Issue date: 9 Jan 2020 |
Application | Utility: Apparatus for Measuring Condition of Electroplating Cell Components and Associated Methods Filling date: 6 Sep 2025 Issue date: 9 Jan 2020 |
Application | Utility: SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOSITION Filling date: 6 Sep 2025 Issue date: 9 Jan 2020 |
Grant | Utility: Systems and methods for UV-based suppression of plasma instability Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Hardware and process for film uniformity improvement Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Tungsten for wordline applications Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Multi-cycle ALD process for film uniformity and thickness profile modulation Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Showing 650 to 700 of 883 patents.